Concepedia

Multilayer Patterning

Multilayer Patterning is a thin-film fabrication technique that involves the sequential deposition and selective etching of multiple material layers to create precisely aligned, three-dimensionally integrated micro- or nanoscale structures on a substrate.

103

Publications

4.9K

Citations

496

Authors

145

Institutions

Publications per year

2017–2026

13

Parents

Publications

103

Interfacial Chemistries for Nanoscale Transfer Printing

Yueh‐Lin Loo, R. L. Willett, K. W. Baldwin et al. · Journal of the American Chemical Society · 2002 · 404 citations

, , +17

Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing

Jana Zaumseil, Matthew Meitl, Julia W. P. Hsu et al. · Nano Letters · 2003 · 271 citations

, , +17

Microcontact Printing of Uniform Nanoparticle Arrays

Venugopal Santhanam, Ronald P. Andres · Nano Letters · 2003 · 249 citations

, , +17

Color-coded multilayer photopatterned microstructures using lanthanide (III) ion co-doped NaYF<sub>4</sub>nanoparticles with upconversion luminescence for possible applications in security

Won Jin Kim, Marcin Nyk, Paras N. Prasad · Nanotechnology · 2009 · 160 citations

, , +16

Nanoimprinting over topography and multilayer three-dimensional printing

Lirong Bao, Xing Cheng, X. D. Huang et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 153 citations

, , +16

1–5 of 103

Authors

496

  1. MW
    Mark W. Horn

    Pennsylvania State University, United States

    3 publications · 67 citations

    3

    h-index

  2. JA
    John A. Rogers

    University of Illinois Urbana-Champaign, United States

    3 publications · 304 citations

    3

    h-index

  3. PT
    Paula T. Hammond

    Massachusetts Institute of Technology, United States

    3 publications · 301 citations

    3

    h-index

  4. CA
    Chad A. Mirkin

    Northwestern University, United States

    3 publications · 187 citations

    3

    h-index

  5. LJ
    L. Jay Guo

    University of Michigan, United States

    3 publications · 227 citations

    3

    h-index

1–5 of 496

Institutions

145

  1. Massachusetts Institute of Technology

    Cambridge, United States

    10 h-index

    34 publications

    1.3K citations

  2. Pennsylvania State University

    State College, United States

    5 h-index

    26 publications

    613 citations

  3. Lawrence Berkeley National Laboratory

    Berkeley, United States

    4 h-index

    20 publications

    671 citations

  4. Jilin University

    Changchun, China

    4 h-index

    14 publications

    607 citations

  5. University of Michigan

    Ann Arbor, United States

    3 h-index

    11 publications

    977 citations

  6. The University of Texas at Austin

    Austin, United States

    3 h-index

    11 publications

    932 citations

  7. Northwestern University

    Evanston, United States

    3 h-index

    12 publications

    748 citations

  8. University of Illinois Urbana-Champaign

    Urbana, United States

    3 h-index

    16 publications

    2K citations

1–8 of 145

Venues

  1. Advanced Materials

    11 publications · 830 citations

    11

    h-index

  2. Langmuir

    11 publications · 454 citations

    11

    h-index

  3. Applied Physics Letters

    8 publications · 544 citations

    8

    h-index

  4. 6

    h-index

  5. Thin Solid Films

    5 publications · 127 citations

    5

    h-index

1–5