Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing

Abstract

This letter describes the use of nanotransfer printing (nTP) for forming three-dimensional (3D) structures with feature sizes between tens of nanometers and tens of microns over areas of several square millimeters. We demonstrate three different approaches−deep etching through printed hard masks, direct transfer of three-dimensional structures, and purely additive fabrication of multilayer stacks−for using nTP to fabricate a range of complex 3D nanostructures, including closed channels, suspended beams, and nanochannel stacks, that would be difficult or impossible to build with other methods.