Concepedia

Lateral-comb Actuators

Lateral-Comb Actuator is an electrostatic microactuator that belongs to the class of comb-drive actuators and is distinguished by the in-plane, side-by-side interdigitated finger arrangement enabling lateral translational motion through electrostatic forces between fixed and movable electrodes.

14

Publications

1.4K

Citations

42

Authors

17

Institutions

Publications per year

2017–2026

1

Variants

Lateral-comb Actuator

Parents

Publications

14

Comb-drive actuators for large displacements

R. Legtenberg, A.W. Groeneveld · Journal of Micromechanics and Microengineering · 1996 · 584 citations · Full text

, , +13

Electrostatic Comb Drive Levitation And Control Method

William C. Tang, Martin Lim, Roger T. Howe · Journal of Microelectromechanical Systems · 1992 · 289 citations

, , +16

Full-Lagrangian Schemes for Dynamic Analysis of Electrostatic MEMS

Sudipto K. De, N. R. Aluru · Journal of Microelectromechanical Systems · 2004 · 137 citations

, , +16

Microscale materials testing using MEMS actuators

Aman Haque, M. Taher A. Saif · Journal of Microelectromechanical Systems · 2001 · 116 citations

, , +17

Electrostatically balanced comb drive for controlled levitation

William C. Tang, Martin Lim, Roger T. Howe · 1990 · 59 citations

, , +16

1–5 of 14

Authors

42

  1. ML
    Martin Lim

    University of California, Berkeley, United States

    2 publications · 348 citations

    2

    h-index

  2. NR
    N. R. Aluru

    University of Illinois Urbana-Champaign, United States

    2 publications · 169 citations

    2

    h-index

  3. RT
    Roger T. Howe

    University of California, Berkeley, United States

    2 publications · 348 citations

    2

    h-index

  4. SK
    Sudipto K. De

    University of Illinois Urbana-Champaign, United States

    2 publications · 169 citations

    2

    h-index

  5. WC
    William C. Tang

    University of California, Irvine, United States

    2 publications · 348 citations

    2

    h-index

1–5 of 42

Institutions

17

  1. University of California, Berkeley

    Berkeley, United States

    3 h-index

    5 publications

    491 citations

  2. University of Illinois Urbana-Champaign

    Urbana, United States

    3 h-index

    6 publications

    570 citations

  3. Louisiana State University

    Baton Rouge, United States

    1 h-index

    1 publications

    25 citations

  4. Seoul National University

    Seoul, South Korea

    1 h-index

    4 publications

    80 citations

  5. Ford Motor Company (United States)

    Dearborn, United States

    1 h-index

    1 publications

    289 citations

  6. Hanyang University

    Seoul, South Korea

    1 h-index

    1 publications

    14 citations

  7. Palo Alto Research Center

    Palo Alto, United States

    1 h-index

    1 publications

    289 citations

  8. Urbana University

    Urbana, United States

    1 h-index

    1 publications

    116 citations

1–8 of 17

Venues

  1. Journal of Microelectromechanical Systems

    4 publications · 558 citations

    4

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 4 publications · 650 citations

    4

    h-index

  3. Sensors and Actuators A Physical

    1 publications · 23 citations

    1

    h-index

  4. Journal of Optics A Pure and Applied Optics

    1 publications · 25 citations

    1

    h-index

  5. Japanese Journal of Applied Physics

    JJAP · 1 publications · 20 citations

    1

    h-index

1–5