Beta Prototypes
Beta Prototypes is a developmental-stage artifact in prototype development that belongs to the class of preliminary models and is distinguished by its completion of core functionality and readiness for external testing in real-world conditions prior to final commercialization.
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143
Citations
51
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Institutions
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2017–2026
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Development status of EUV sources for use in beta-tools and high-volume chip manufacturing tools
Uwe Stamm, J. Kleinschmidt, D. Bolshukhin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 13 citations
Engineering, Manufacturing Engineering, Nuclear Engineering +9
Tin DPP source collector module (SoCoMo) ready for integration into Beta scanner
Masaki Yoshioka, Yusuke Teramoto, Jeroen Jonkers et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations
Engineering, Manufacturing Engineering, Materials Science +11
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2 publications · 25 citations
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1 publications · 70 citations
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1 publications · 37 citations
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