Concepedia

Ravi Ramanathan

RR

3

Publications

142

Citations

3

H-Index

2005

Active since

Affiliations

Skyworks Solutions (United States)(Current)

Ravi Ramanathan is an author at Skyworks Solutions (United States) specializing in engineering, applied physics, and thin films.

Top concepts

EngineeringApplied PhysicsThin FilmsMaterial ScienceMicroelectronicsElectrical EngineeringPhotovoltaicsSemiconductorsElectrical InsulationMicrowave Engineering

Publications per year

2005–2012

3

Publications

3

Characterization of atomic layer deposition HfO2, Al2O3, and plasma-enhanced chemical vapor deposition Si3N4 as metal–insulator–metal capacitor dielectric for GaAs HBT technology

Jiro Yota, Hong Shen, Ravi Ramanathan · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2012 · 99 citations

Engineering, High Density Capacitor, Chemical Deposition +16

Fabrication of a low resistivity tantalum nitride thin film

Hong Shen, Ravi Ramanathan · Microelectronic Engineering · 2005 · 23 citations

Materials Science, Engineering, Low Resistivity Tantalum +4

Variable Frequency Microwave and Convection Furnace Curing of Polybenzoxazole Buffer Layer for GaAs HBT Technology

Jiro Yota, Hoa Ly, Ravi Ramanathan et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 20 citations

Pbo Film, Electrical Engineering, Vfm Cure +11

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