Statistics
Publications
2
Citations
65
H-Index
2
Active since
2000
Affiliations
Oxford Instruments (United Kingdom)(Current)
Andrew L. Goodyear is an author at Oxford Instruments (United Kingdom) specializing in microfabrication, materials science, and engineering.
Publications per year
2000–2007
2
2
Sonny S. Mark, Magnus Bergkvist, Parijat Bhatnagar et al. · Colloids and Surfaces B Biointerfaces · 2007 · 39 citations
High resolution inductively coupled plasma etching of 30 nm lines and spaces in tungsten and silicon
Andrew L. Goodyear, Sinclair Mackenzie, Deirdre L. Olynick et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 26 citations
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