Statistics
Publications
2
Citations
38
H-Index
2
Active since
1994
Affiliations
Sinclair Mackenzie is an author at National Microelectronics Applications Centre (Ireland) specializing in applied physics, microfabrication, and microelectronics.
Publications per year
1994–2000
2
2
High resolution inductively coupled plasma etching of 30 nm lines and spaces in tungsten and silicon
Andrew L. Goodyear, Sinclair Mackenzie, Deirdre L. Olynick et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 26 citations
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