Yilin Hong

Optimum inductively coupled plasma etching of fused silica to remove subsurface damage layer

Xiaolong Jiang, Ying D. Liu, Zhengkun Liu et al. · Applied Surface Science · 2015 · 19 citations

Engineering, Materials Engineering, Materials Science +14

Study on the surface roughness of substrate with multi-fractal spectrum

Shuyi Gan, Qing Zhou, Xiangdong Xu et al. · Microelectronic Engineering · 2007 · 19 citations

Engineering, Materials Engineering, Materials Science +13

Nanostructures on fused silica surfaces produced by ion beam sputtering with Al co-deposition

Ying Liu, Dietmar Hirsch, Renate Fechner et al. · Applied Physics A · 2017 · 16 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Design and fabrication of 1300-line/mm polarization-independent reflection gratings for spectral beam combining

Xinyu Mao, Chaoming Li, Keqiang Qiu et al. · Optics Communications · 2019 · 16 citations

Engineering, Materials Engineering, Materials Science +12

Alignment method combining interference lithography with anisotropic wet etch technique for fabrication of high aspect ratio silicon gratings

Yanchang Zheng, Keqiang Qiu, Huoyao Chen et al. · Optics Express · 2014 · 14 citations · Full text

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +13