Concepedia

Huoyao Chen

HC

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Publications

2

Citations

25

H-Index

2

Active since

2014

Affiliations

National Synchrotron Radiation Laboratory(Current)

Huoyao Chen is an author at National Synchrotron Radiation Laboratory specializing in silicon, wet etching, and silicon wafers.

Publications per year

2014–2019

2

Publications

2

Alignment method combining interference lithography with anisotropic wet etch technique for fabrication of high aspect ratio silicon gratings

Yanchang Zheng, Keqiang Qiu, Huoyao Chen et al. · Optics Express · 2014 · 14 citations · Full text

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +13

Soft X-ray varied-line-spacing gratings fabricated by near-field holography using an electron beam lithography-written phase mask

Dakui Lin, Zhengkun Liu, Kay Dietrich et al. · Journal of Synchrotron Radiation · 2019 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

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