Concepedia

Yanchang Zheng

YZ

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Publications

1

Citations

14

H-Index

1

Active since

2014

Yanchang Zheng is an author specializing in microfabrication, etching processes, and anisotropic wet etching.

Publications per year

2014–2014

1

Publications

1

Alignment method combining interference lithography with anisotropic wet etch technique for fabrication of high aspect ratio silicon gratings

Yanchang Zheng, Keqiang Qiu, Huoyao Chen et al. · Optics Express · 2014 · 14 citations · Full text

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +13

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