Microelectronic Engineering · 2007 · 19 citations · 7 references
EngineeringMaterials EngineeringMaterials ScienceSurface EngineeringSurface ScienceFractal GeometrySurface MetrologySurface MorphologySurface RoughnessSurface TextureSurface TopographyFractal RoughnessFractal SurfacesMultifractal SpectrumSurface Roughness AnalysisThin Film Surface Roughness
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