Yoshihiro Kurata

Photoluminescence of Hydrogenated Amorphous Carbon Films

Ichiro Watanabe, Seiichi Hasegawa, Yoshihiro Kurata · Japanese Journal of Applied Physics · 1982 · 97 citations

Optical Materials, Electronic Devices, Electronic Materials +14

Si-H and N-H vibrational properties in glow-discharge amorphous SiN<i>x</i>:H films (0&amp;lt;<i>x</i>&amp;lt;1.55)

Seiichi Hasegawa, Masaaki Matsuda, Yoshihiro Kurata · Applied Physics Letters · 1990 · 38 citations

Engineering, Glow Discharge, Thin Film Process Technology +18

Influence of Organic Contamination on Silicon Dioxide Integrity

F. Sugimoto, S. Okamura, Takao Inokuma et al. · Japanese Journal of Applied Physics · 2000 · 25 citations

Engineering, Chemistry, Silicon On Insulator +16

Axially Controlled Solid-Phase Crystallization of Amorphous Silicon

Seiichi Hasegawa, Takuya Nakamura Takuya Nakamura, Yoshihiro Kurata · Japanese Journal of Applied Physics · 1992 · 21 citations

Engineering, Thin Film Process Technology, Silicon On Insulator +17

Effects of the Addition of SiF₄ to the SiH₄ Feed Gas for Depositing Polycrystalline Silicon Films at Low Temperature

Moniruzzaman Syed, Takao Inokuma, Yoshihiro Kurata et al. · Japanese Journal of Applied Physics · 1997 · 17 citations

Engineering, Polycrystalline Silicon Films, Chemistry +17