Concepedia

Takuya Nakamura Takuya Nakamura

TN

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Publications

3

Citations

48

H-Index

3

Active since

1992

Affiliations

Saitama University(Current)

Takuya Nakamura Takuya Nakamura is an author at Saitama University specializing in thin films, materials science, and silicon materials.

Publications per year

1992–1997

3

Publications

3

Axially Controlled Solid-Phase Crystallization of Amorphous Silicon

Seiichi Hasegawa, Takuya Nakamura Takuya Nakamura, Yoshihiro Kurata · Japanese Journal of Applied Physics · 1992 · 21 citations

, , +17

Initial Stage of Microcrystalline Silicon Growth by Plasma-Enhanced Chemical Vapor Deposition

Takeshi Arai, Takuya Nakamura Takuya Nakamura, Hajime Shirai · Japanese Journal of Applied Physics · 1996 · 16 citations

, , +17

Fast Deposition of Amorphous and Microcrystalline Silicon Films from SiH<sub>2</sub>Cl<sub>2</sub>–SiH<sub>4</sub>–H<sub>2</sub> by Plasma-Enhanced Chemical Vapor Deposition

Takeshi Arai, Takuya Nakamura Takuya Nakamura, Hajime Shirai · Japanese Journal of Applied Physics · 1997 · 11 citations

, , +17

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