F. Sugimoto

Adsorption Behavior of Organic Contaminants on a Silicon Wafer Surface

F. Sugimoto, S. Okamura · Journal of The Electrochemical Society · 1999 · 45 citations

Plastic Storage Boxes, Engineering, Chemistry +18

Simultaneous Temperature Measurement of Wafers in Chemical Mechanical Polishing of Silicon Dioxide Layer

F. Sugimoto, Y. Arimoto, Takashi Ito · Japanese Journal of Applied Physics · 1995 · 31 citations

Engineering, Mechanical Engineering, Silicon On Insulator +19

Influence of Organic Contamination on Silicon Dioxide Integrity

F. Sugimoto, S. Okamura, Takao Inokuma et al. · Japanese Journal of Applied Physics · 2000 · 25 citations

Engineering, Chemistry, Silicon On Insulator +16

A 65 nm CMOS technology with a high-performance and low-leakage transistor, a 0.55 μm/sup 2/ 6T-SRAM cell and robust hybrid-ULK/Cu interconnects for mobile multimedia applications

S. Nakai, M. Kojima, N. Misawa et al. · 2004 · 19 citations

Engineering, Vlsi Design, Mobile Multimedia Applications +17

45 nm-node BEOL integration featuring porous-ultra-low-k/Cu multilevel interconnects

I. Sugiura, Yoshihiro Nakata, N. Misawa et al. · 2005 · 14 citations

Materials Science, 3D Ic Architecture, Electrical Engineering +15