Concepedia

Eung-Jik Lee

EL

Statistics

Publications

3

Citations

53

H-Index

3

Active since

1997

Affiliations

Korea Advanced Institute of Science and Technology(Current)

Eung-Jik Lee is an author at Korea Advanced Institute of Science and Technology specializing in engineering, applied physics, and thin films.

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Publications per year

1997–1998

3

Publications

3

Reactive Ion Etching Mechanism of RuO<sub>2</sub> Thin Films in Oxygen Plasma with the Addition of CF<sub>4</sub>, Cl<sub>2</sub>, and N<sub>2</sub>

Eung-Jik Lee, Jinwoong Kim, Won-Jong Lee Won-Jong Lee · Japanese Journal of Applied Physics · 1998 · 26 citations

, , +17

Effects of deposition parameters on composition, structure, resistivity and step coverage of TiN thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition

Jongseok Kim, Eung-Jik Lee, Jong-Tae Baek et al. · Thin Solid Films · 1997 · 14 citations

, , +10

A comparative study on the properties of TiN films prepared by chemical vapor deposition enhanced by r.f. plasma and by electron cyclotron resonance plasma

Jongseok Kim, Byung‐Hyuk Jun, Eung-Jik Lee et al. · Thin Solid Films · 1997 · 13 citations

, , +7

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