Eung-Jik Lee - Concepedia

Author

Eung-Jik Lee

Also Known As

Eung-Jik Lee, Eung-Jik Lee Eung-Jik Lee, Lee, Eung-Jik

Publications

Citations

H-Index

Concepts

All Affiliations

Eung-Jik Lee is an author at Korea Advanced Institute of Science and Technology specializing in engineering, applied physics, and thin films.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	53
2	Applied Physics	3	3	53
3	Materials Engineering	2	2	40
4	Chemical Engineering	1	1	26
5	Chemistry	1	1	26

Eung-Jik Lee

Publications

Citations

H-Index

Page 1

	Year	Citations
Reactive Ion Etching Mechanism of RuO<sub>2</sub> Thin Films in Oxygen Plasma with the Addition of CF<sub>4</sub>, Cl<sub>2</sub>, and N<sub>2</sub> Eung-Jik Lee, Jinwoong Kim, Won-Jong Lee Won-Jong Lee Japanese Journal of Applied Physics EngineeringCf 4Vacuum DeviceChemistryPlasma Processing	1998	26
Effects of deposition parameters on composition, structure, resistivity and step coverage of TiN thin films deposited by electron cyclotron resonance plasma-enhanced chemical vapor deposition Jongseok Kim, Eung-Jik Lee, Jong-Tae Baek, Thin Solid Films Materials EngineeringMaterials ScienceEngineeringDeposition ParametersSurface Science	1997	14
A comparative study on the properties of TiN films prepared by chemical vapor deposition enhanced by r.f. plasma and by electron cyclotron resonance plasma Jongseok Kim, Byung‐Hyuk Jun, Eung-Jik Lee, Thin Solid Films Materials ScienceTin FilmsEngineeringApplied PhysicsChemical Vapor Deposition	1997	13

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