Anita A. Mayo Anita A. Mayo

Publications

Citations

H-Index

1997

Active since

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

Anita A. Mayo Anita A. Mayo is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, applied physics, and microelectronics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMicroelectronicsMicrofabricationPhysicsMaterial ScienceElectronic PackagingNumerical Simulation

Publications per year

1997–1997

Publications

Across-wafer nonuniformity of long throw sputter deposition

Anita A. Mayo Anita A. Mayo, Satoshi Hamaguchi, Jaewon Joo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 46 citations · Full text

Wafer Scale Processing, Engineering, Electron-beam Lithography +12

Numerical Simulation of Etching and Deposition Processes

Satoshi Hamaguchi, Anita A. Mayo Anita A. Mayo, S. M. Rossnagel et al. · Japanese Journal of Applied Physics · 1997 · 22 citations

Materials Science, Surface Characterization, Surface Evolution +14

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