Anita A. Mayo Anita A. Mayo

Author

IBM Research - Thomas J. Watson Research Center

Also Known As

A. A. Mayo, Anita A. Mayo Anita A. Mayo, Mayo, A.

Publications

Citations

H-Index

Concepts

All Affiliations

IBM Research - Thomas J. Watson Research Center

About

Anita A. Mayo Anita A. Mayo is an author at IBM Research - Thomas J. Watson Research Center specializing in microfabrication, applied physics, and microelectronics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	2	2	68
2	Applied Physics	2	2	68
3	Microelectronics	2	2	68
4	Materials Science	1	1	22
5	Physics	1	1	46

Anita A. Mayo Anita A. Mayo

Publications

Citations

H-Index

Page 1

	Year	Citations
Across-wafer nonuniformity of long throw sputter deposition Anita A. Mayo Anita A. Mayo, Satoshi Hamaguchi, Jaewon Joo, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Wafer Scale ProcessingEngineeringElectron-beam LithographyPhysicsMicrofabrication	1997	46
Numerical Simulation of Etching and Deposition Processes Satoshi Hamaguchi, Anita A. Mayo Anita A. Mayo, S. M. Rossnagel, Japanese Journal of Applied Physics Materials ScienceSurface CharacterizationSurface EvolutionEngineeringMicrofabrication	1997	22

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