Y. Furuta

Fabrication of three-dimensional structures of resist by proton beam writing

Y. Furuta, N. Uchiya, Hiroyuki Nishikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 24 citations

Engineering, Electron-beam Lithography, Target Fabrication +18

Ni electroplating on a resist micro-machined by proton beam writing

N. Uchiya, Y. Furuta, Hiroyuki Nishikawa et al. · Microsystem Technologies · 2008 · 18 citations

Materials Science, Materials Engineering, Electrometallurgy +9

Applications of microstructures fabricated by proton beam writing to electric-micro filters

Y. Furuta, Hiroyuki Nishikawa, Takahiro Satoh et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2009 · 18 citations

Materials Science, Electrical Engineering, Proton Beam +8

An opto-electrochemical phosphate-ion sensor using a cobalt-oxide thin-film electrode

Youichi Shimizu, Y. Furuta · Solid State Ionics · 1998 · 18 citations

Cobalt-oxide Thin-film Electrode, Engineering, Sensors +4

Effects of membrane properties on CO2 recovery performance in a gas absorption membrane contactor

Nobuhide Takahashi, Y. Furuta, Hiroshi Fukunaga et al. · Energy Procedia · 2011 · 15 citations · Full text

Catalytic Membrane, Chemical Engineering, Engineering +13