Concepedia
Statistics
Publications
3
Citations
92
H-Index
Active since
2007
Affiliations
Shibaura Institute of Technology(Current)
Japan Atomic Energy Agency
Advanced Science Research Center
N. Uchiya is an author at Shibaura Institute of Technology specializing in micromachining, microfabrication, and engineering.
Publications per year
2007–2008
Micro-machining of resists on silicon by proton beam writing
N. Uchiya, Takuya Harada, Masato Murai et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2007 · 50 citations
Engineering, Manufacturing Engineering, Materials Science +12
Fabrication of three-dimensional structures of resist by proton beam writing
Y. Furuta, N. Uchiya, Hiroyuki Nishikawa et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 24 citations
Engineering, Materials Engineering, Materials Science +12
Ni electroplating on a resist micro-machined by proton beam writing
N. Uchiya, Y. Furuta, Hiroyuki Nishikawa et al. · Microsystem Technologies · 2008 · 18 citations
Engineering, Materials Engineering, Materials Science +8
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