S. Ingrey

Measurement of GaAs surface oxide desorption temperatures

A. J. SpringThorpe, S. Ingrey, B. Emmerstorfer et al. · Applied Physics Letters · 1987 · 118 citations

Semiconductors, Materials Science, Electrical Engineering +10

An x-ray photoelectron spectroscopy study on ozone treated GaAs surfaces

S. Ingrey, W. M. Lau, N. S. McIntyre · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 74 citations

Engineering, Oxidation Resistance, Chemistry +17

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> x-ray photoelectron spectroscopic study of remote plasma enhanced chemical vapor deposition of silicon nitride on sulfide passivated InP

Woon‐Ming Lau, Sang‐Man Jin, Xueyin Wu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 45 citations

Engineering, Optoelectronic Devices, Chemistry +17

III–V surface processing

S. Ingrey · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 38 citations

Engineering, Iii–v Surface Processing, Computer-aided Design +19

Effect of pressure on the properties of reactively sputtered Ta2O5

W. D. Westwood, Richard Boynton, S. Ingrey · Journal of Vacuum Science and Technology · 1974 · 37 citations

Materials Science, Materials Engineering, Chemical Engineering +14