Statistics
Publications
1
Citations
21
H-Index
1
Active since
2005
Affiliations
CEA Grenoble(Current)
G. Cunge is an author at CEA Grenoble specializing in materials science, oxygen-bearing species, and bromine chemistry.
Publications per year
2005–2005
1
1
Mass spectrometry studies of resist trimming processes in HBr∕O2 and Cl2∕O2 chemistries
Erwine Pargon, O. Joubert, T. Chevolleau et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 21 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +15
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