Concepedia

K. Hirano

KH

Statistics

Publications

2

Citations

53

H-Index

2

Active since

2001

Affiliations

NEC (Japan)(Current)

K. Hirano is an author at NEC (Japan) specializing in environmental remediation, bioremediation, and engineering.

Top concepts

Publications per year

2001–2002

2

Publications

2

An efficient treatment technique for TMAH wastewater by catalytic oxidation

K. Hirano, Junji Okamura, Toshio Taira et al. · IEEE Transactions on Semiconductor Manufacturing · 2001 · 41 citations

, , +15

Effective and environmentally friendly remover for photo resist and ashing residue for use in Cu/low-k process

T. Koito, K. Hirano, K. Nakabeppu · IEEE Transactions on Semiconductor Manufacturing · 2002 · 12 citations

, , +19

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