Concepedia
Statistics
Publications
2
Citations
41
H-Index
Active since
1998
Affiliations
NEC (Japan)(Current)
T. Koito is an author at NEC (Japan) specializing in engineering, photocatalysis, and waste management.
Top concepts
EngineeringBioremediationPhotocatalysisWaste ManagementChemical EngineeringEnvironmental EngineeringHealthChemistryCorrosionRecycling
Publications per year
1998–2002
A novel treatment technique for DMSO wastewater
T. Koito, Masafumi Tekawa, A. Toyoda · IEEE Transactions on Semiconductor Manufacturing · 1998 · 29 citations
Advanced Oxidation Process, Engineering, Environmental Photochemistry +19
Effective and environmentally friendly remover for photo resist and ashing residue for use in Cu/low-k process
T. Koito, K. Hirano, K. Nakabeppu · IEEE Transactions on Semiconductor Manufacturing · 2002 · 12 citations
Engineering, Chemistry, Corrosion Inhibition +19
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