Concepedia
Statistics
Publications
3
Citations
83
H-Index
Active since
2005
Affiliations
Carnegie Mellon University(Current)
Sungkyunkwan University
S.‐K. KANG is an author at Carnegie Mellon University specializing in physics, applied physics, and engineering.
Top concepts
PhysicsEngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsChemical EngineeringChemistryCorrosionMicrofabrication
Publications per year
2005–2011
Etching of CoFeB Using CO∕NH[sub 3] in an Inductively Coupled Plasma Etching System
Jongyoon Park, S.‐K. KANG, Minhwan Jeon et al. · Journal of The Electrochemical Society · 2010 · 40 citations
Engineering, Plasma Processing, Surface Processing +16
Etch Damage of Ge<sub>2</sub>Sb<sub>2</sub>Te<sub>5</sub>for Different Halogen Gases
S.‐K. KANG, Min-Hwan Jeon, Jong-Yoon Park et al. · Japanese Journal of Applied Physics · 2011 · 29 citations
Materials Science, Sio 2, Chemical Engineering +15
Contribution of bottom-emitted radicals to the deposition of a film on the SiO2 sidewall during CHF3 plasma etching
Gyeo-Re Lee, Jae-Ho Min, Jin-Kwan Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 14 citations
Materials Science, Chf3 Plasma, Engineering +13
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