Concepedia

Jin-Kwan Lee

JL

2

Publications

32

Citations

2

H-Index

2005

Active since

Affiliations

Seoul National University(Current)

Jin-Kwan Lee is an author at Seoul National University specializing in engineering, microelectronics, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsPhysicsMicrofabricationMaterials EngineeringMechanical Engineering

Publications per year

2005–2009

2

Publications

2

Cyclic Deposition/Etching Process to Etch a Bowing-Free SiO[sub 2] Contact Hole

Jin-Kwan Lee, Il-Yong Jang, Seung-Haeng Lee et al. · Journal of The Electrochemical Society · 2009 · 18 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +17

Contribution of bottom-emitted radicals to the deposition of a film on the SiO2 sidewall during CHF3 plasma etching

Gyeo-Re Lee, Jae-Ho Min, Jin-Kwan Lee et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 14 citations

Materials Science, Chf3 Plasma, Engineering +13

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