Concepedia

Il-Yong Jang

IJ

3

Publications

94

Citations

3

H-Index

2009

Active since

Affiliations

Seoul National University(Current)

Ajou University

Il-Yong Jang is an author at Seoul National University specializing in microfabrication, applied physics, and microelectronics.

Top concepts

Publications per year

2009–2010

3

Publications

3

Mechanism of Sidewall Necking and Bowing in the Plasma Etching of High Aspect-Ratio Contact Holes

Jin-Kwan Lee, Il-Yong Jang, Seung-Haeng Lee et al. · Journal of The Electrochemical Society · 2010 · 46 citations · Full text

, , +9

Oblique-Directional Plasma Etching of Si Using a Faraday Cage

Jin-Kwan Lee, Seung-Haeng Lee, Jae-Ho Min et al. · Journal of The Electrochemical Society · 2009 · 30 citations

, , +11

Cyclic Deposition/Etching Process to Etch a Bowing-Free SiO[sub 2] Contact Hole

Jin-Kwan Lee, Il-Yong Jang, Seung-Haeng Lee et al. · Journal of The Electrochemical Society · 2009 · 18 citations

, , +17

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