K. Takagi is an author at Ulvac (Japan) specializing in engineering, electrical engineering, and plasma physics.
Top concepts
EngineeringPlasma PhysicsInstrumentationElectrical EngineeringPhysicsMicroscopyMechatronicsSpectroscopyPlasma ScienceApplied Physics
Publications per year
1985–1990
5
5
Eiji Yabe, Akira Tonegawa, D Satoh et al. · Vacuum · 1986 · 12 citations
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