Concepedia
1
Publications
10
Citations
H-Index
1985
Active since
Affiliations
Ulvac (Japan)(Current)
Shinichi Takeshiro is an author at Ulvac (Japan) specializing in plasma science, engineering, and electrical engineering.
Top concepts
EngineeringPlasma PhysicsPlasma ScienceElectrical Engineering
Publications per year
1985–1985
An ion source with plasma generator
Eiji Yabe, Shinichi Takeshiro, K. Sunako et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 10 citations
Electrical Engineering, Engineering, Applied Plasma Physic +4
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