1 MV rotating-disc type high voltage generator for application to an implanter

A. Isoya, Yoshihiro Miyake, K. Takagi, Tomoki Uchiyama, K. Yui, Ryuji Kikuchi, S. Komiya, Cody K. Hayashi

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1985 · 11 citations · 1 references

Concepts

References

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