Concepedia
1
Publications
51
Citations
H-Index
2008
Active since
Affiliations
NXP (Netherlands)(Current)
R Li is an author at NXP (Netherlands).
Publications per year
2008–2008
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
R Li, Yann Lamy, W. F. A. Besling et al. · Journal of Micromechanics and Microengineering · 2008 · 51 citations · Full text
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