Concepedia
Author
R Li
Also Known As
R Li, ruomeng li
6
Publications
54
Citations
2
H-Index
0
Concepts
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All Concepts
1
51
Continuous deep reactive ion etching of tapered via holes for three-dimensional integration
R Li, Yann Lamy, W. F. A. Besling, +2
Journal of Micromechanics and Microengineering
2008
Page 1