Michael R. Dickinson

Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources

André Anders, S. Anders, I.G. Brown et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 157 citations

Natural Sciences, Materials Science, Physics +17

`Triggerless' triggering of vacuum arcs

André Anders, I.G. Brown, R.A. MacGill et al. · Journal of Physics D Applied Physics · 1998 · 135 citations

Natural Sciences, Electrical Engineering, Physics +12

Commissioning an EUV mask microscope for lithography generations reaching 8 nm

Kenneth A. Goldberg, Iacopo Mochi, Markus P. Benk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 45 citations · Full text

Engineering, Physics, Instrumentation +11

High ion charge states in a high-current, short-pulse, vacuum arc ion source

André Anders, I.G. Brown, R.A. MacGill et al. · Review of Scientific Instruments · 1996 · 33 citations

Natural Sciences, Materials Science, Physics +13

Role of Stabilizing Surfactants on Capacitance, Charge, and Ion Transport in Organic Nanoparticle-Based Electronic Devices

Mohsen Ameri, Mohammed F. Al‐Mudhaffer, Furqan Almyahi et al. · ACS Applied Materials & Interfaces · 2019 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17