Concepedia

S. Lao

SL

Statistics

Publications

4

Citations

176

H-Index

4

Active since

2001

Affiliations

University of California, Los Angeles(Current)

S. Lao is an author at University of California, Los Angeles specializing in materials science, plasma-enhanced chemical vapor deposition, and natural sciences.

Publications per year

2001–2005

4

Publications

4

Plasma enhanced atomic layer deposition of HfO2 and ZrO2 high-k thin films

S. Lao, Ryan M. Martin, Jane P. Chang · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 79 citations

, , +17

Spectroscopic study of plasma using zirconium tetra-<i>tert</i>-butoxide for the plasma enhanced chemical vapor deposition of zirconium oxide

Byeong‐Ok Cho, S. Lao, Lin Sha et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 38 citations

, , +17

Origin and effect of impurity incorporation in plasma-enhanced ZrO2 deposition

Byeong‐Ok Cho, S. Lao, Jane P. Chang · Journal of Applied Physics · 2003 · 37 citations

, , +15

Real-Time Carbon Content Control for PECVD ZrO&amp;lt;tex&amp;gt;$_2$&amp;lt;/tex&amp;gt;Thin-Film Growth

Dong Ni, Yifei Lou, Panagiotis D. Christofides et al. · IEEE Transactions on Semiconductor Manufacturing · 2004 · 22 citations

, , +17

1–4 of 4