Concepedia

Yoshiaki Mimura

YM

Statistics

Publications

2

Citations

62

H-Index

2

Active since

1978

Affiliations

Musashino Academia Musicae(Current)

Yoshiaki Mimura is an author at Musashino Academia Musicae specializing in engineering, optical systems, and optical properties.

Top concepts

PhotonicsEngineeringOptical SystemsOptical PropertiesMicroscopyFiber OpticsOphthalmologyApplied PhysicsOptoelectronicsOptical Materials

Publications per year

1978–1992

2

Publications

2

Deep-UV Photolithography

Yoshiaki Mimura, Takashi Ohkubo, Tatsuo Takeuchi et al. · Japanese Journal of Applied Physics · 1978 · 51 citations

Photonics, Organic Photonics, Optical Materials +15

Investigation of single sideband optical lithography using oblique incidence illumination

Emi Tamechika, Seitaro Matsuo, Kazuhiko Komatsu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 11 citations

Engineering, Electron-beam Lithography, Microscopy +16

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