Etsuro Sugimata

Investigation of the TiN Gate Electrode With Tunable Work Function and Its Application for FinFET Fabrication

Yongxun Liu, Shinya Kijima, Etsuro Sugimata et al. · IEEE Transactions on Nanotechnology · 2006 · 119 citations

Engineering, Electrical Engineering, Materials Science +17

Four-Terminal FinFETs Fabricated Using an Etch-Back Gate Separation

Kazuhiko Endo, Yuki Ishikawa, Yongxun Liu et al. · IEEE Transactions on Nanotechnology · 2007 · 23 citations

Engineering, Electrical Engineering, Electronic Materials +12

Experimental Study of Effective Carrier Mobility of Multi-Fin-Type Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistors with (111) Channel Surface Fabricated by Orientation-Dependent Wet Etching

Yongxun Liu, Etsuro Sugimata, Kenichi Ishii et al. · Japanese Journal of Applied Physics · 2006 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

Effect of Heat-Treatment of Sizing Agent on Mechanical Strength of Carbon Fiber Reinforced Plastic Composite Material

Etsuro Sugimata, Ousuke Ishida, Takayuki Tsukegi et al. · Journal of Fiber Science and Technology · 2020 · 11 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of a Vertical-Channel Double-Gate Metal–Oxide–Semiconductor Field-Effect Transistor Using a Neutral Beam Etching

Kazuhiko Endo, Shuichi Noda, Meishoku Masahara et al. · Japanese Journal of Applied Physics · 2006 · 10 citations

Engineering, Electrical Engineering, Materials Science +16