Concepedia

M. Elwenspoek

ME

34

Publications

1.6K

Citations

21

H-Index

1993

Active since

Affiliations

University of Twente(Current)

Helmholtz Institute Jena

Leibniz University Hannover

Space Research Organisation Netherlands

Radboud University Nijmegen

M. Elwenspoek is an author at University of Twente specializing in engineering, mechanical engineering, and microfabrication.

Top concepts

EngineeringMechanical EngineeringMicrofabricationMaterial ScienceMicrofluidicsApplied PhysicsMicroelectronicsSoft RoboticsMicrostructureElectrical Engineering

Publications per year

1993–2018

34

Publications

34

Electrostatic curved electrode actuators

R. Legtenberg, James Gilbert, S.D. Senturia et al. · Journal of Microelectromechanical Systems · 1997 · 247 citations

Electrical Engineering, Engineering, Soft Robotics +15

Resistless patterning of sub-micron structures by evaporation through nanostencils

Juergen Brügger, S. Kuiper, W. Nijdam et al. · Microelectronic Engineering · 2000 · 155 citations · Full text

Materials Science, Nanoscale System, Engineering +8

An electrochemical microactuator: principle and first results

C.R. Neagu, M. Elwenspoek, J. J. Kelly · Journal of Microelectromechanical Systems · 1996 · 113 citations · Full text

Electrical Engineering, Electrochemical Microactuator, Engineering +12

High resolution powder blast micromachining

H. Wensink, Henri Jansen, M. Elwenspoek · 2002 · 109 citations

Materials Science, Engineering, Powder Metallurgy +15

Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Meindert Dijkstra, Meint J. de Boer, T.S.J. Lammerink et al. · Sensors and Actuators A Physical · 2007 · 90 citations

Heat Transfer Process, Engineering, Microfabrication +12

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