Ming Shih Tsai

Statistics

Publications

Citations

117

H-Index

Active since

2000

Affiliations

National Institutes of Applied Research(Current)

National Yang Ming Chiao Tung University

National Cheng Kung University

Feng Chia University

Ming Shih Tsai is an author at National Institutes of Applied Research specializing in materials engineering, materials science, and mechanical polishing.

Publications per year

2000–2006

Publications

The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer

Shao-Yu Chiu, Ying-Lang Wang, Chuan-Pu Liu et al. · Materials Chemistry and Physics · 2003 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +16

Analysis of the Tribological Mechanisms Arising in the Chemical Mechanical Polishing of Copper-Film Wafers

Jen Fin Lin, Junne Dar Chern, Yang Chang et al. · Journal of Tribology · 2004 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17

Analysis of the Tribological Mechanisms Arising in the Chemical Mechanical Polishing of Copper-Film Wafers When Using a Pad With Concentric Grooves

Jen Fin Lin, Sheng-Chao Chen, Yu Long Ouyang et al. · Journal of Tribology · 2006 · 19 citations

Engineering, Materials Engineering, Materials Science +15

Retardation in the chemical-mechanical polish of the boron-doped polysilicon and silicon

Wen Yang, Chih‐Yuan Cheng, Ming Shih Tsai et al. · IEEE Electron Device Letters · 2000 · 16 citations

Engineering, Materials Engineering, Materials Science +15

Novel cleaning solutions for polysilicon film post chemical mechanical polishing

Tung Ming Pan, Tan Fu Lei, C. CHEN et al. · IEEE Electron Device Letters · 2000 · 15 citations

Engineering, Materials Engineering, Materials Science +17

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