Author
Marion K. Matters-Kammerer
Also Known As
M. K. Matters-Kammerer, M. Matters-Kammerer, M.K. Matters-Kammerer, M.K. Matters‐Kammerer, Marion K. Matters-Kammerer, Marion Matters-Kammerer, Marion. K. Matters-Kammerer
83
Publications
683
Citations
15
H-Index
39
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 13 | 18 | 395 |
2 | Electrical Engineering | 12 | 14 | 334 |
3 | Applied Physics | 3 | 3 | 69 |
4 | Computer Engineering | 3 | 3 | 47 |
5 | Materials Engineering | 1 | 1 | 46 |
Marion K. Matters-Kammerer
×
23
Publications
515
Citations
15
H-Index
| Year | Citations | |
|---|---|---|
2016 | 47 | |
2004 | 46 | |
2013 | 44 | |
2019 | 41 | |
2018 | 30 | |
2013 | 26 | |
2014 | 26 | |
2010 | 26 | |
Characterization and Modeling of Atomic Layer Deposited High-Density Trench Capacitors in Silicon Marion K. Matters-Kammerer, K. B. Jinesh, Theo G. S. M. Rijks, IEEE Transactions on Semiconductor Manufacturing Situ Ozone AnnealingEngineeringSilicon On InsulatorAtomic LayerInterconnect (Integrated Circuits) | 2012 | 23 |
2015 | 22 |
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