Concepedia

Mariko Isono

MI

3

Publications

42

Citations

3

H-Index

1999

Active since

Affiliations

Toho Gakuen(Current)

Mariko Isono is an author at Toho Gakuen specializing in engineering, natural sciences, and analytical chemistry.

Top concepts

EngineeringNatural SciencesChemistrySpectroscopyApplied PhysicsInstrumentationMaterial ScienceMicrofabricationOptical PropertiesAnalytical Chemistry

Publications per year

1999–2004

3

Publications

3

Measurement of parameters for simulation of deep-UV lithography using an FT-IR baking system

Atsushi Sekiguchi, Chris A. Mack, Mariko Isono et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 17 citations

Optical Materials, Engineering, Ftir Spectrometer +27

Analysis of Deprotection Reaction in Chemically Amplified Resists Using an Fourier Transform Infrared Spectrometer with an Exposure Tool

Atsushi Sekiguchi, Yasuhiro Miyake, Mariko Isono · Japanese Journal of Applied Physics · 2000 · 13 citations

Protection Groups, Engineering, Atomic Emission Spectroscopy +17

Study of proximity lithography simulations using measurements of dissolution rate and calculation of the light intensity distributions in the photoresist

Yoshihisa Sensu, Mariko Isono, Atsushi Sekiguchi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +21

Rows per page

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