Kou-Chiang Tsai

Publications

Citations

H-Index

2001

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

Kou-Chiang Tsai is an author at National Yang Ming Chiao Tung University specializing in applied physics, materials engineering, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceMaterials EngineeringSurface ScienceChemical EngineeringChemistryThin FilmsMicrostructureNanoelectronics

Publications per year

2001–2005

Publications

Novel multilayered Ti/TiN diffusion barrier for Al metallization

Wen-Fa Wu, Kou-Chiang Tsai, Chuen-Guang Chao et al. · Journal of Electronic Materials · 2005 · 32 citations

Materials Engineering, Materials Science, Aluminium Nitride +6

Characteristics of fluorinated amorphous carbon films and implementation of 0.15 μm Cu/a-C:F damascene interconnection

Jia‐Min Shieh, Shich-Chang Suen, Kou-Chiang Tsai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 13 citations

Engineering, Thin Film Process Technology, Chemistry +17

Reduction of etching plasma damage on low dielectric constant fluorinated amorphous carbon films by multiple H2 plasma treatment

Jia‐Min Shieh, Kou-Chiang Tsai, Bau‐Tong Dai et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 11 citations

Materials Engineering, Materials Science, Chemical Engineering +15

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