Marco A. R. Alves

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Active since

2003

Affiliations

Universidade Estadual de Campinas (UNICAMP)(Current)

Marco A. R. Alves is an author at Universidade Estadual de Campinas (UNICAMP) specializing in semiconductor devices, engineering, and silicon materials.

Publications per year

2003–2006

Publications

SiO2 single layer for reduction of the standing wave effects in the interference lithography of deep photoresist structures on Si

Edson J. Carvalho, Marco A. R. Alves, Edmundo S. Braga et al. · Microelectronics Journal · 2006 · 22 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Amorphous hydrogenated carbon films used as masks for silicon microtips fabrication in a reactive ion etching with SF6 plasma

Marco A. R. Alves, Lésnir F. Porto, Pedro H.L. de Faria et al. · Vacuum · 2003 · 16 citations

Engineering, Materials Engineering, Materials Science +17

Current–voltage characterization and temporal stability of the emission current of silicon tip arrays

Marco A. R. Alves, Pedro H.L. de Faria, Edmundo S. Braga · Microelectronic Engineering · 2004 · 12 citations

Engineering, Electrical Engineering, Materials Engineering +15

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