Junro Sakai

Selective epitaxial growth by UHV-CVD using Si2H6 and Cl2

Toru Tatsumi, Ken-ichi Aketagawa, Masayuki Hiroi et al. · Journal of Crystal Growth · 1992 · 49 citations

Selective Epitaxial Growth, Applied Physics, Molecular Beam Epitaxy +2

Enhanced performance in sub-100 nm CMOSFETs using strained epitaxial silicon-germanium

Yee‐Chia Yeo, Qiang Lu, Tsu‐Jae King et al. · 2002 · 39 citations

Electrical Engineering, Engineering, Nmosfet Drive +10

Characterization of Stable Fluorine-Doped Silicon Oxide Film Prepared by Biased Helicon Plasma Chemical Vapor Deposition

Takahiro Tamura, Youichi INOUE, Makoto Satoh et al. · Japanese Journal of Applied Physics · 1996 · 30 citations

Materials Science, Materials Engineering, Engineering +12

Electron Concentration and Mobility Dependence of Breakdown of the Quantum Hall Effect

Takeharu Okuno, Shinji Kawaji, Takahiro Ohrui et al. · Journal of the Physical Society of Japan · 1995 · 29 citations

Wide-bandgap Semiconductor, Quantum Science, Semiconductor Technology +15

Limiting conditions of Si selective epitaxial growth in Si2H6 gas-source molecular beam epitaxy

Ken-ichi Aketagawa, T. Tatsumi, Junro Sakai · Applied Physics Letters · 1991 · 22 citations

Materials Engineering, Materials Science, Selective Epitaxial Growth +10