Comparison of the damage and contamination produced by CF4 and CF4/H2 reactive ion etching: The role of hydrogen

X. C. Mu, S.J. Fonash, A. Rohatgi, +1

Applied Physics Letters

Materials ScienceEnvironmental ChemistryChemical EngineeringOwn DamageEtched Silicon +12

Tunable twin-guide (TTG) distributed feedback (DFB) laser with over 10 nm continuous tuning range

T. Wolf, S. Illek, J. Rieger, +2

Electronics Letters

PhotonicsEngineeringOptical Transmission SystemTunable Twin-guideWavelength Tuning +10

Gain-coupled DFB lasers with atitanium surface Bragg grating

T.W. Johannes, A. Rast, W. Harth, +1

Electronics Letters

Ar ion beam and CCl4 reactive ion etching: A comparison of etching damage and of damage passivation by hydrogen

X. C. Mu, Stephen J. Fonash, Bing-Chwen Yang, +3

Journal of Applied Physics

EngineeringSingle-crystal SiliconSilicon On InsulatorH+ ImplantsIon Implantation +15

Comparison of Zn and Mg incorporation in MOVPE InP/GaInAsP laser structures

E. Veuhoff, H. Baumeister, J. Rieger, +2

Journal of Electronic Materials

Materials ScienceMaterials EngineeringAdvanced Laser ProcessingEngineeringOptical Properties +7

High-temperature (130°C) CW operation of 1.53 μm InGaAsP ridge-waveguide lasers using strained quaternary quantum wells

B. Stegmüller, E. Veuhoff, J. Rieger, +1

Electronics Letters

Vertically integrated Mach-Zehnder interferometer(VMZ) widely tunable laser diodewith improved wavelength access

B. Borchert, S. Illek, T. Wolf, +2

Electronics Letters

Fabrication of AlGaInAs and GaInAsP buried heterostructure lasers by in situ etching

A. Dobbinson, A. Miler, J. Rieger, +1

Journal of Crystal Growth

PhotonicsAdvanced Laser ProcessingOptical MaterialsEngineeringSemiconductor Lasers +9

Tunable twin-guide lasers with improved performance fabricated by metal-organic vapor phase epitaxy

Thomas Wolf, S. Illek, J. Rieger, +2

IEEE Photonics Technology Letters

Short Wavelength OpticOptical MaterialsEngineeringLaser ScienceLaser Applications +19

WDM receiver chip with high responsivity

C. Cremer, M. Schier, G. Baumeister, +8

Electronics Letters

Optical MaterialsSemiconductor Optical AmplifierEngineeringOptical Transmission SystemOptical Wireless Communication +16