Kazuhisa Kudou

Novel Surface Structure and Its Fabrication Process for MEMS Fingerprint Sensor

Norio Sato, Satoshi Shigematsu, Hiroki Morimura et al. · IEEE Transactions on Electron Devices · 2005 · 63 citations

Engineering, Mechanical Engineering, Microelectromechanical Systems +20

A novel semiconductor capacitive sensor for a single-chip fingerprint sensor/identifier LSI

Katsuyuki Machida, Satoshi Shigematsu, Hiroki Morimura et al. · IEEE Transactions on Electron Devices · 2001 · 47 citations

Materials Science, Electrical Engineering, Normal Identification Usage +13

MEMS fingerprint sensor immune to various finger surface conditions

Norio Sato, Katsuyuki Machida, Hiroki Morimura et al. · IEEE Transactions on Electron Devices · 2003 · 40 citations

Engineering, Microfabrication, Fingerprint Analysis +14

RF CMOS-MEMS Switch with Low-Voltage Operation for Single-Chip RF LSIs

Kei Kuwabara, Norio Sato, Teppei Shimamura et al. · 2006 · 20 citations

Low-power Electronics, Electrical Engineering, Engineering +9

<title>Microfabrication technology for high-speed Si-based systems</title>

Shouji Yagi, Kunio Saito, Akihiko Hirata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 19 citations