Concepedia

Myoung Hun Shin

MH

2

Publications

58

Citations

2

H-Index

2005

Active since

Affiliations

Sungkyunkwan University(Current)

Myoung Hun Shin is an author at Sungkyunkwan University specializing in chemical engineering, engineering, and chemistry.

Top concepts

ChemistryEngineeringApplied PhysicsSurface ScienceChemical EngineeringPhysicsHydrogenThin FilmsNanomaterialsPhotochemistry

Publications per year

2005–2005

2

Publications

2

Investigation of process window during dry etching of ZnO thin films by CH4–H2–Ar inductively coupled plasma

Sun-Woong Na, Myoung Hun Shin, Yun M. Chung et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 33 citations

Engineering, Inorganic Photochemistry, Chemistry +17

Dry Etching of TaN/HfO<sub>2</sub> Gate Stack Structure by Cl<sub>2</sub>/SF<sub>6</sub>/Ar Inductively Coupled Plasma

Myoung Hun Shin, Sung-Woong Na, Nae‐Eung Lee et al. · Japanese Journal of Applied Physics · 2005 · 25 citations

Engineering, Plasma Physics, Vacuum Device +17

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