Yun M. Chung

The low temperature synthesis of Al doped ZnO films on glass and polymer using magnetron co-sputtering: Working pressure effect

Yun M. Chung, Chang S. Moon, Min J. Jung et al. · Surface and Coatings Technology · 2005 · 48 citations

Materials Engineering, Materials Science, Glass-ceramic +9

The physiochemical properties of TiOxNy films with controlled oxygen partial pressure

Min J. Jung, Kyung H. Nam, Yun M. Chung et al. · Surface and Coatings Technology · 2003 · 43 citations

Materials Engineering, Materials Science, Tioxny Films +7

Atmospheric RF plasma effects on the film adhesion property

Yun M. Chung, Min J. Jung, Jeon G. Han et al. · Thin Solid Films · 2004 · 37 citations

Plasma Application, Film Adhesion Property, Applied Physics

Investigation of process window during dry etching of ZnO thin films by CH4–H2–Ar inductively coupled plasma

Sun-Woong Na, Myoung Hun Shin, Yun M. Chung et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 33 citations

Engineering, Inorganic Photochemistry, Chemistry +17

The low temperature synthesis of Al doped ZnO films on glass and polymer using pulsed co-magnetron sputtering: H2 effect

Yun M. Chung, Chang S. Moon, Woo Sung Jung et al. · Thin Solid Films · 2006 · 30 citations

Materials Engineering, Materials Science, Glass-ceramic +8