6
Publications
294
Citations
6
H-Index
1974
Active since
T. S. Kuan is an author at Cornell University specializing in materials science, engineering, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsOptical PropertiesChemistrySpectroscopyNanomaterialsCrystallographySurface ScienceDefect Tolerance
Publications per year
1974–2006
6
6
Damage of ultralow k materials during photoresist mask stripping process
Xuefeng Hua, Ming-Shu Kuo, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 66 citations
Materials Science, Materials Engineering, Chemical Engineering +15
Xuefeng Hua, Christian Stolz, G. S. Oehrlein et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 33 citations
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