F.-P. Steiner

Thermally actuated CMOS micromirrors

Johannes Bühler, Johannes Funk, Oliver Paul et al. · Sensors and Actuators A Physical · 1995 · 57 citations

Engineering, Microfabrication, Applied Physics +5

Electrostatic aluminum micromirrors using double-pass metallization

Johannes Bühler, Johannes Funk, Jan G. Korvink et al. · Journal of Microelectromechanical Systems · 1997 · 51 citations

Materials Science, Materials Engineering, Engineering +15

Polymer Coated Capacitive Microintegrated Gas Sensor

F.-P. Steiner, Andreas Hierlemann, C. Cornila et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 22 citations

Materials Science, Chemical Engineering, Engineering +14

Double Pass Metallization For Cmos Aluminum Actuators

Johannes Bühler, Johannes Funk, F.-P. Steiner et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 13 citations

Materials Science, Materials Engineering, Engineering +8