J. Wada - Concepedia

Author

J. Wada

Also Known As

J. WADA, J. Wada, Jamila Muhammad Wada, Jun Wada

Publications

120

Citations

H-Index

Concepts

All Affiliations

J. Wada is an author at Toshiba (Japan) specializing in applied physics, engineering, and electrical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	45
2	Applied Physics	3	3	45
3	Electrical Engineering	3	3	45
4	Materials Engineering	2	2	21
5	Materials Science	2	2	21

J. Wada

Publications

Citations

H-Index

Page 1

	Year	Citations
Boron doping of silicon by ArF excimer laser irradiation in B2H6 Satoru Matsumoto, Shinichi Yoshioka, J. Wada, Journal of Applied Physics EngineeringLaser ApplicationsLaser AblationLaser MaterialOptoelectronic Devices	1990	24
Low resistance dual damascene process by new Al reflow using Nb liner J. Wada, Y. Oikawa, T. Katata, Materials ScienceMaterials EngineeringElectrical EngineeringAluminium NitrideEngineering	2002	11
Copper Line Resistance Control and Reliability Improvement by Surface Nitridation of Ti barrier Metal A. Sakata, Shuzo Kato, Yuuri Yano, Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringCorrosion	2008	10

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