J. Wada is an author at Toshiba (Japan) specializing in applied physics, engineering, and electrical engineering.
Top concepts
EngineeringApplied PhysicsElectrical EngineeringMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringPhysicsCorrosionMicrostructure
Publications per year
1990–2008
3
3
Boron doping of silicon by ArF excimer laser irradiation in B2H6
Satoru Matsumoto, Shinichi Yoshioka, J. Wada et al. · Journal of Applied Physics · 1990 · 24 citations
Low resistance dual damascene process by new Al reflow using Nb liner
J. Wada, Y. Oikawa, T. Katata et al. · 2002 · 11 citations
Materials Science, Materials Engineering, Electrical Engineering +14
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