Y. Oikawa is an author at Waseda University specializing in materials engineering, engineering, and materials science.
Top concepts
EngineeringMaterial ScienceMaterials EngineeringChemistryMicrostructureApplied PhysicsSurface ScienceElectrochemistryMicroelectronicsSurface Chemistry
Publications per year
2000–2002
2
2
Hiroyuki Bando, K. Koizumi, Y. Oikawa et al. · Journal of Physics Condensed Matter · 2000 · 175 citations
Materials Science, Materials Engineering, Chemical Engineering +15
Low resistance dual damascene process by new Al reflow using Nb liner
J. Wada, Y. Oikawa, T. Katata et al. · 2002 · 11 citations
Materials Science, Materials Engineering, Electrical Engineering +14
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1–2 of 2