T. Katata is an author at Toshiba (Japan) specializing in electronic packaging, applied physics, and materials engineering.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringElectrical EngineeringMicrostructureNanoelectronicsElectrical Insulation
Publications per year
2002–2004
2
2
Low resistance dual damascene process by new Al reflow using Nb liner
J. Wada, Y. Oikawa, T. Katata et al. · 2002 · 11 citations
Materials Science, Materials Engineering, Electrical Engineering +14
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