Concepedia

T. Katata

TK

Statistics

Publications

2

Citations

27

H-Index

2

Active since

2002

Affiliations

Toshiba (Japan)(Current)

T. Katata is an author at Toshiba (Japan) specializing in electronic packaging, applied physics, and materials engineering.

Top concepts

Publications per year

2002–2004

2

Publications

2

Highly reliable Cu/low-k dual-damascene interconnect technology with hybrid (PAE/SiOC) dielectrics for 65 nm-node high performance eDRAM

Akihiro Kajita, T. Usui, Masao Yamada et al. · 2004 · 16 citations

, , +15

Low resistance dual damascene process by new Al reflow using Nb liner

J. Wada, Y. Oikawa, T. Katata et al. · 2002 · 11 citations

, , +14

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