Kôji Miyata

Infrared diode laser absorption spectroscopy measurements of CF<i>X</i> (<i>X</i>=1–3) radical densities in electron cyclotron resonance plasmas employing C4F8, C2F6, CF4, and CHF3 gases

Kôji Miyata, Masaru Hori, Toshio Goto · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 77 citations

Natural Sciences, Chemistry, Physics +14

CF<i>X</i> radical generation by plasma interaction with fluorocarbon films on the reactor wall

Kôji Miyata, Masaru Hori, Toshio Goto · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1996 · 56 citations

Natural Sciences, Materials Science, Physics +17

Kinetics of Radicals in CF₄ and C₄F₈ Electron Cyclotron Resonance Plasmas

Kôji Miyata, Masaru Hori, Toshio Goto · Japanese Journal of Applied Physics · 1997 · 41 citations

Natural Sciences, Chemistry, Physics +14

CF_X (X=1-3) Radical Measurements in ECR Etching Plasma Employing C₄F₈ Gas by Infrared Diode Laser Absorption Spectroscopy

Kôji Miyata, Kunimasa Takahashi, Shigeru Kishimoto et al. · Japanese Journal of Applied Physics · 1995 · 37 citations

Natural Sciences, Chemistry, Physics +7

Ab initio study on the charge-transfer complexes of boron trihalide with ammonia, trimethylamine, phosphine and trimethylphosphine

F. Hirota, Kôji Miyata, Shuzo Shibata · Journal of Molecular Structure THEOCHEM · 1989 · 34 citations

Natural Sciences, Chemistry, Materials Science +16